Microstructure producing method for forming e.g. ionizer electrodes, comprises placing substrate with stepped surface in stream of particles

A substrate (2) with a stepped surface (1) is positioned in a stream of particles so that at least part of its surface is shielded from the particles by the shadow effect of the steps (5, 6). A method for producing a device comprises placing at least part of a substrate in a stream of particles such...

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Bibliographische Detailangaben
Hauptverfasser:	JASON ANGELO GIOVANNI VIOTTY, JOB ELDERS, GERARDUS JOHANNES BURGER, HERMANUS MARCELLINUS MARIA KLEIN KOERKAMP
Format:	Patent
Sprache:	dut ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MICROSTRUCTURAL TECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate (2) with a stepped surface (1) is positioned in a stream of particles so that at least part of its surface is shielded from the particles by the shadow effect of the steps (5, 6). A method for producing a device comprises placing at least part of a substrate in a stream of particles such as atoms, molecules, electrons, ions or photons. The substrate surface contains at least one step formed e.g. by a protrusion such as a rib (3) or column or by a depression such as a groove (4) or cavity. The substrate is positioned in the stream so that at least part of the substrate surface is shielded from the particles by the shadow effect of the step(s).