NANOPOROUS SILICON MEMBRANE WITH DIELECTROPHORETIC ELECTRODES

The present invention relates to a nanoporous silicon membrane (100) with dielectrophoretic electrodes and its method of manufacturing thereof. In particular, the present invention relates to nanoporous silicon membranes (100) dielectrophoretic electrodes as a filter for separation of biological mol...

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Bibliographische Detailangaben
Hauptverfasser: Farahdiana Wan Yunus, JUMRIL YUNAS, MUHAMAD RAMDZAN BUYONG, AZRUL AZLAN HAMZAH
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to a nanoporous silicon membrane (100) with dielectrophoretic electrodes and its method of manufacturing thereof. In particular, the present invention relates to nanoporous silicon membranes (100) dielectrophoretic electrodes as a filter for separation of biological molecules. The nanoporous silicon membrane (100) is arranged in a form of an array and comprises of a silicon wafer substrate (101) and plurality of electrodes wherein the electrodes are deposited on the surface of the fabricated nanoporous silicon membrane (100). The type of electrode used in the present invention is preferably straight electrode (201) and castellated electrode (301). The nanoporous silicon membrane (100) operates by pairing it with the application of dielectrophoresis to enhance the separation of particles. By combining the nanoporous silicon membrane (100) and positive dielectrophoretic force together, the present invention is able to separate particles of various shapes and sizes, and most importantly prevent clogging at the membrane. (The most illustrative drawing is FIG 1.0)