INSPECTING APPARATUS AND PROCESSING APPARATUS INCLUDING THE SAME

An inspecting apparatus (56) for inspecting a test piece (1). The inspecting apparatus (56) includes a test piece holding mechanism (58) for holding the test piece (1), the test piece holding mechanism (58) having a mounting portion (76) formed from a transparent member having upper and lower expose...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Tomoaki SUGIYAMA, Hirohiko KOZAI, Naoki MORIKAWA
Format: Patent
Sprache:eng
Schlagworte:
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