INSPECTING APPARATUS AND PROCESSING APPARATUS INCLUDING THE SAME

An inspecting apparatus (56) for inspecting a test piece (1). The inspecting apparatus (56) includes a test piece holding mechanism (58) for holding the test piece (1), the test piece holding mechanism (58) having a mounting portion (76) formed from a transparent member having upper and lower expose...

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Bibliographische Detailangaben
Hauptverfasser:	Tomoaki SUGIYAMA, Hirohiko KOZAI, Naoki MORIKAWA
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An inspecting apparatus (56) for inspecting a test piece (1). The inspecting apparatus (56) includes a test piece holding mechanism (58) for holding the test piece (1), the test piece holding mechanism (58) having a mounting portion (76) formed from a transparent member having upper and lower exposed surfaces, the upper exposed surface of the transparent member functioning as a mounting surface (76a) for mounting the test piece (1), whereby the test piece (1) mounted on the mounting surface (76a) of the mounting portion (76) is adapted to be held by the test piece holding mechanism (58). The inspecting apparatus (56) further includes an imaging mechanism (82) for imaging the test piece (1) held by the test piece holding mechanism (58), the imaging mechanism (82) having a first imaging unit (106a) provided above the mounting portion (76), a second imaging unit (106b) provided below the mounting portion (76), and a connecting portion (108) for connecting the first imaging unit (106a) and the second imaging unit (106b).