ELECTRICALLY CONDUCTIVE BONDING MATERIAL AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

The present invention provides an electrically conductive bonding material having a high bonding strength and a high thermal conductivity, and capable of forming a bonding layer providing a very low porosity under low pressurization. The present invention relates to an electrically conductive bondin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Takeshi KONDO, Shintaroh ABE, Teruki TANAKA, Rikia FURUSHO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention provides an electrically conductive bonding material having a high bonding strength and a high thermal conductivity, and capable of forming a bonding layer providing a very low porosity under low pressurization. The present invention relates to an electrically conductive bonding material which bonds a chip and an adherend under pressure, the electrically conductive bonding material containing silver particles; silver compound particles; and a dispersant, wherein the silver particles and the silver compound particles are present in a weight ratio of 30:70 to 70:30, and the electrically conductive bonding material provide a porosity of 15% or less after the chip and the adherend are subject to pressurizing-bond under an air atmosphere of pressure of 10 MPa and 280?C for 5 minutes.