LOGIC CHIP INCLUDING EMBEDDED MAGNETIC TUNNEL JUNCTIONS

An embodiment integrates memory, such as spin-torque transfer magnetoresistive random access memory, (STT-MRAM, within a logic chip. The STT-MRAM includes a magnetic tunnel junction, MTJ, with an upper MTJ layer (125), lower MTJ layer (140), and tunnel barrier (135) directly contacting the upper MTJ...

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Bibliographische Detailangaben
Hauptverfasser: STEIGERWALD, Joseph M, LEE, Kevin J, EPPLE, John H, GHANI, Tahir, WANG, Yih
Format: Patent
Sprache:eng
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Zusammenfassung:An embodiment integrates memory, such as spin-torque transfer magnetoresistive random access memory, (STT-MRAM, within a logic chip. The STT-MRAM includes a magnetic tunnel junction, MTJ, with an upper MTJ layer (125), lower MTJ layer (140), and tunnel barrier (135) directly contacting the upper MTJ layer (125) and the lower MTJ layer (140); wherein the upper MTJ layer (125) includes an upper MTJ layer sidewall and the lower MTJ layer (140) includes a lower MTJ sidewall horizontally offset from the upper MTJ layer (125). Another embodiment includes a memory area (110), comprising a MTJ, and a logic area (105) located on a substrate (195); wherein a horizontal plane intersects the MTJ, a first Inter- Layer Dielectric, (ILD, material (145) adjacent the MTJ, and a second ILD material (155, 170, 185) included in the logic area (105), the first and second ILD materials being unequal to one another. In an embodiment the first and second ILDs directly contact one another. Other embodiments are described herein. The most illustrative drawing is Figure 1