WATER JET PROCESSING APPARATUS

Disclosed herein is a water jet processing apparatus (1) including a chuck table (10) that holds a workpiece (200) by a holding surface (11), a high-pressure water injection unit (20) having a high-pressure water nozzle (21) that injects high-pressure water (300) along planned dividing lines (205) o...

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Bibliographische Detailangaben
1. Verfasser: Satoshi Hanajima
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed herein is a water jet processing apparatus (1) including a chuck table (10) that holds a workpiece (200) by a holding surface (11), a high-pressure water injection unit (20) having a high-pressure water nozzle (21) that injects high-pressure water (300) along planned dividing lines (205) of the workpiece (200) to remove burrs (211), a processing feed unit (40) that carries out processing feed of the chuck table (10) in an X-direction, and an indexing feed unit (50) that carries out indexing feed of the high-pressure water nozzle (21) in a Y-direction. The water jet processing apparatus (1) also includes a movement unit (60) that moves the high-pressure water nozzle (21) in a Z-direction, an alignment unit (30) that images the workpiece (200), a cassette placement region (70) in which a cassette (71) that houses plural workpieces (200) is placed, and a conveying unit (90) that conveys the workpiece (200) between the cassette (71) and the chuck table (10). The most suitable drawing: FIG. 1.