CONFOCAL IMAGING OF AN OBJECT UTILISING A PINHOLE ARRAY

A confocal imaging apparatus for inspecting an object (36) comprises a light source (12) operative to project light to illuminate the object, and an imaging device for receiving light reflected from the object (36) along a lighting path located between the object (36) and the imaging device. A pinho...

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Hauptverfasser: DENG JIANGWEN, SZE WUI FUNG
Format: Patent
Sprache:eng
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Zusammenfassung:A confocal imaging apparatus for inspecting an object (36) comprises a light source (12) operative to project light to illuminate the object, and an imaging device for receiving light reflected from the object (36) along a lighting path located between the object (36) and the imaging device. A pinhole array (22) comprising a plurality of pinholes (24) is positioned along the lighting path such that light reflected from the object (36) is passed through the pinhole array (22). A mechanism is operative to move the pinhole array (22) along a single axis in a linear direction transverse to the light path for transmitting an image corresponding to a substantially contiguous area of the object (36) onto the imaging device.