SEMICONDUCTOR WIRE BONDING MACHINE CLEANING DEVICE AND METHOD

A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube (400) in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material (224) may include a cleaning pad la...

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Hauptverfasser: HUMPHREY, BRET A, SHIVLAL, JANAKRAJ, SMITH, WAYNE C, HUMPHREY, ALAN E
Format: Patent
Sprache:eng
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Zusammenfassung:A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube (400) in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material (224) may include a cleaning pad layer and one or more intermediate layers that have predetermined characteristics. (Fig. 10A)