SEMICONDUCTOR WIRE BONDING MACHINE CLEANING DEVICE AND METHOD
A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube (400) in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material (224) may include a cleaning pad la...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube (400) in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material (224) may include a cleaning pad layer and one or more intermediate layers that have predetermined characteristics. (Fig. 10A) |
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