A METHOD OF FABRICATING A GAS SENSOR

A method of fabricating a gas sensor with a conductive sensing element on a microhotplate (102) is provided, the method includes the steps of fabricating a microhotplate (102) on silicon, fabricating a nanostructured sensor on the microhotplate (102) by growing of conductive nanotubes (110) or nanow...

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Bibliographische Detailangaben
Hauptverfasser:	Teh Aun Shih, Azlina Mohd Zain, Daniel Bien Chia Sheng, Muhamad Ramdzan Buyong
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A method of fabricating a gas sensor with a conductive sensing element on a microhotplate (102) is provided, the method includes the steps of fabricating a microhotplate (102) on silicon, fabricating a nanostructured sensor on the microhotplate (102) by growing of conductive nanotubes (110) or nanowires with metal catalyst and functionalising the conductive nanotubes or nanowires, wherein step the nanotubes (110) or nanowires are functionalised with metal oxides selected from a group consisting and not limited to tin oxide (SnO2), tungsten oxide (WOx), tantalum pent-oxide (Ta2O5), aluminium oxide (Al2O3) copper oxide (CuO), iron oxide (Fe2O3), titanium oxide (TiO), Neodymium Oxide (Nd2O3) and zinc oxide (ZnO). (Figure 2)