PROCESS FOR CONVERTING SILICON TETRACHLORIDE TO TRICHLOROSILANE

The invention relates to a process for converting silicon tetrachloride (STC) to trichlorosilane (TCS), by introducing reactant gas (1) containing STC and hydrogen into a reaction zone of a reactor in which the temperature is 1000-1600? C., wherein the reaction zone is heated by a heater located outside the reaction zone and the product gas (2) containing TCS which forms is then cooled, with the proviso that it is cooled to a temperature of 700-900? C. within 0.1-35 ms, wherein the reactant gas (1) is heated by the product gas (2) by means of a heat exchanger working in couiltercurrent, wherein reactor and heat exchanger form a single, gas-tight component, wherein the component includes one or more ceramic materials selected from the group consisting of silicon carbide, silicon nitride, graphite, SiC-coated graphite and quartz glass. (Fig.1)