METHOD FOR PREPARING TRICHLOROSILANE
The present invention relates to a method for preparing trichlorosilane. According to the method for preparing trichlorosilane of the present invention, trichlorosilane may be obtained with improved yield using silicon where copper silicide is formed. Figure 1.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention relates to a method for preparing trichlorosilane. According to the method for preparing trichlorosilane of the present invention, trichlorosilane may be obtained with improved yield using silicon where copper silicide is formed. Figure 1. |
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