MONOLITHIC ON-CHIP FINE TUNE SPIRAL INDUCTOR DEVICE

A monolithic on-chip fine tune spiral inductor device (100) comprises a semiconductor substrate (101) including a plurality of metal layers; a plurality of peripheral metal grounds (102) being formed in one of the metal layers and disposed at peripheral of the semiconductor substrate and connected t...

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Bibliographische Detailangaben

Hauptverfasser:	Norlaili binti Mohd. Noh, Farshad Eshghabadi, Shukri Korakkottil Kunhi Mohd, Awatif binti Hashim, Othman bin Sidek, Yusman bin Mohd. Yusof, Fatemeh Banitorfian, Asrulnizam bin Abd Manaf, Mohd Tafir bin Mustaffa
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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