MONOLITHIC ON-CHIP FINE TUNE SPIRAL INDUCTOR DEVICE

A monolithic on-chip fine tune spiral inductor device (100) comprises a semiconductor substrate (101) including a plurality of metal layers; a plurality of peripheral metal grounds (102) being formed in one of the metal layers and disposed at peripheral of the semiconductor substrate and connected to a perfect ground; a patterned metal shield (103) formed in central portion of the semiconductor substrate on the same metal layer forming the peripheral metal grounds, wherein the patterned metal shield comprises a plurality of isolated metal slots, and the plurality of isolated metal slots are isolated from each other and switched individually or in a group; a conductive inductor loop (104) having one or more turns overlying the patterned metal shield and being formed on a metal layer that is different from the one forming the peripheral metal grounds; and a plurality of switches (105) electrically coupling the peripheral metal grounds to the metal slots of the patterned metal shield.