POLYCRYSTALLINE SILICON ROD CARRYING TOOL, AND POLYCRYSTALLINE SILICON ROD RETRIEVAL METHOD

Air bags (220A, 220B) are provided respectively at two planes facing each other on the inner circumference surface of a cylindrical member (210). Retrieving polycrystalline silicon rods (11) involves accommodating it inside the cylindrical member (210) of a carrying tool (200), for example, by putti...

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Bibliographische Detailangaben

Hauptverfasser:	KUROSAWA, Yasushi, NETSU, Shigeyoshi
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
Online-Zugang:	Volltext bestellen
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