POLYCRYSTALLINE SILICON ROD CARRYING TOOL, AND POLYCRYSTALLINE SILICON ROD RETRIEVAL METHOD

POLYCRYSTALLINE SILICON ROD CARRYING TOOL, AND POLYCRYSTALLINE SILICON ROD RETRIEVAL METHOD

Air bags (220A, 220B) are provided respectively at two planes facing each other on the inner circumference surface of a cylindrical member (210). Retrieving polycrystalline silicon rods (11) involves accommodating it inside the cylindrical member (210) of a carrying tool (200), for example, by putti...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KUROSAWA, Yasushi, NETSU, Shigeyoshi
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Air bags (220A, 220B) are provided respectively at two planes facing each other on the inner circumference surface of a cylindrical member (210). Retrieving polycrystalline silicon rods (11) involves accommodating it inside the cylindrical member (210) of a carrying tool (200), for example, by putting the cylindrical member (210) on the rods (11) from above, and inflating the air bags (220) by gas injection so as to press the sides of the polycrystalline silicon rods (11) from a direction perpendicular to a plane including both pillars of the U-shaped silicon core wire so that the polycrystalline silicon rods (11) are held in place inside the cylindrical member (210). Then, the polycrystalline silicon rods (11) held in place are taken out of the reactor. Even if the polycrystalline silicon rods (11) have cracks, a collapse and the like are avoided as the air bags (220) absorb external impacts or the like.