SYSTEM ARCHITECTURE FOR COMBINED STATIC AND PASS-BY PROCESSING

SYSTEM ARCHITECTURE FOR COMBINED STATIC AND PASS-BY PROCESSING

Disclosed is a substrate processing system (100, 500) which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. The system (100, 500) is constructed such that the substrates (103) arc processed therein vertically, and each chamber ha...

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Bibliographische Detailangaben
Hauptverfasser: RUCK, ROBERT L, FAIRBAIRN, KEVIN P, HARKNESS, IV., SAMUEL D, LEAHEY, PATRICK, BLUCK, TERRY, LAWSON, ERIC, LIU, CHARLES
Format: Patent
Sprache:eng
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Zusammenfassung:Disclosed is a substrate processing system (100, 500) which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. The system (100, 500) is constructed such that the substrates (103) arc processed therein vertically, and each chamber has a processing source attached to one sidewall thereof, wherein the other sidewall backs to a complementary processing chamber. The chamber system can be milled from a single block of metal, e.g., aluminum, wherein the block is milled from both sides, such that a wall remains and separates each two complementary processing chambers.