COATING FLUID FOR BORON DIFFUSION
A coating fluid comprising a boron compound, an organic binder, a silicon compound, an alumina precursor, and water and/or an organic solvent is used to diffuse boron into a silicon substrate (1) to form a p-type diffusion layer (2). The coating fluid is spin coated onto the substrate (1) to form a...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A coating fluid comprising a boron compound, an organic binder, a silicon compound, an alumina precursor, and water and/or an organic solvent is used to diffuse boron into a silicon substrate (1) to form a p-type diffusion layer (2). The coating fluid is spin coated onto the substrate (1) to form a uniform coating having a sufficient amount of impurity whereupon a p-type diffusion layer (2) having in-plane uniformity is formed. The most illustrative drawing is FIG.1. |
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