DEVICE WITH CARBON NANOTUBE

THE PRESENT INVENTION PROVIDES A DEVICE WITH CARBON NANOTUBES WHEREIN THE NANOTUBES [20] ARE GROWN VERTICALLY ONTO THE SUBSTRATE SURFACE AND IN-BETWEEN THE FINGERS OF AN INTERDIGITAL STRUCTURE. THE COMPLETED ARRAY OF CONDUCTIVE INTERDIGITATED FINGERS WITH A PLURALITY OF THE VERTICAL CARBON NANOTUBES...

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Bibliographische Detailangaben
Hauptverfasser: Teh Aun Shih, Mohsen Nabipoor, Daniel Bien Chia Sheng
Format: Patent
Sprache:eng
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Zusammenfassung:THE PRESENT INVENTION PROVIDES A DEVICE WITH CARBON NANOTUBES WHEREIN THE NANOTUBES [20] ARE GROWN VERTICALLY ONTO THE SUBSTRATE SURFACE AND IN-BETWEEN THE FINGERS OF AN INTERDIGITAL STRUCTURE. THE COMPLETED ARRAY OF CONDUCTIVE INTERDIGITATED FINGERS WITH A PLURALITY OF THE VERTICAL CARBON NANOTUBES ARE THEN INTEGRATED AS AN INTERDIGITAL DEVICE WHERE THIS DEVICE OPERATES BASED ON THE FRINGING ELECTRIC FIELD EFFECTS. AT LEAST TWO CONDUCTIVE FINGERS [22] SPACED APART ACT AS ELECTRODES OF CAPACITOR. A PLURALITY OF CARBON NANOTUBES [20] IS VERTICALLY FORMED ON TOP OF CONDUCTIVE FINGERS OR BETWEEN CONDUCTIVE FINGERS. CARBON NANOTUBES HAVE PERMITTIVITY WHICH CHANGES ACCORDING TO ENVIRONMENT, HENCE AFFECTING CAPACITANCE MEASURED. DIFFERENT EMBODIMENTS OF DEVICE HAVING THE NANOTUBES PLACED IN TRENCH ARE SHOWN. THE CARBON NANOTUBE INTERDIGITAL DEVICE CAN OPERATE AS A SENSOR FOR APPLICATION IN AREAS OF AGRICULTURE, AQUACULTURE, ENVIRONMENTAL MONITORING AND BIOMEDICAL.