POLISHING COMPOSITION
THE PRESENT INVENTION RELATES TO A POLISHING COMPOSITION MORE SUITABLE FOR USE IN POLISHING A SUBSTRATE FOR A MAGNETIC DISK. THE POLISHING COMPOSITION INCLUDES SILICON DIOXIDE, A PHOSPHORUS-CONTAINING COMPOUND CONTAINING AT LEAST ONE COMPOUND SELECTED FROM A SPECIFIC GROUP, AMMONIUM SALT CONTAINING...
Gespeichert in:
Hauptverfasser: | , , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | THE PRESENT INVENTION RELATES TO A POLISHING COMPOSITION MORE SUITABLE FOR USE IN POLISHING A SUBSTRATE FOR A MAGNETIC DISK. THE POLISHING COMPOSITION INCLUDES SILICON DIOXIDE, A PHOSPHORUS-CONTAINING COMPOUND CONTAINING AT LEAST ONE COMPOUND SELECTED FROM A SPECIFIC GROUP, AMMONIUM SALT CONTAINING AT LEAST ONE SALT PRODUCED BY A NEUTRALIZATION REACTION OF EACH OF SPECIFIC ACID WITH AMMONIA, HYDROGEN PEROXIDE, AND WATER. |
---|