POLISHING COMPOSITION

THE PRESENT INVENTION RELATES TO A POLISHING COMPOSITION MORE SUITABLE FOR USE IN POLISHING A SUBSTRATE FOR A MAGNETIC DISK. THE POLISHING COMPOSITION INCLUDES SILICON DIOXIDE, A PHOSPHORUS-CONTAINING COMPOUND CONTAINING AT LEAST ONE COMPOUND SELECTED FROM A SPECIFIC GROUP, AMMONIUM SALT CONTAINING...

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Hauptverfasser: YASUSHI MATSUNAMI, TOSHIKI OWAKI, JUNICHI HIRANO, NORITAKA YOKOMICHI
Format: Patent
Sprache:eng
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Zusammenfassung:THE PRESENT INVENTION RELATES TO A POLISHING COMPOSITION MORE SUITABLE FOR USE IN POLISHING A SUBSTRATE FOR A MAGNETIC DISK. THE POLISHING COMPOSITION INCLUDES SILICON DIOXIDE, A PHOSPHORUS-CONTAINING COMPOUND CONTAINING AT LEAST ONE COMPOUND SELECTED FROM A SPECIFIC GROUP, AMMONIUM SALT CONTAINING AT LEAST ONE SALT PRODUCED BY A NEUTRALIZATION REACTION OF EACH OF SPECIFIC ACID WITH AMMONIA, HYDROGEN PEROXIDE, AND WATER.