APPARATUS AND METHOD FOR SUPPORTING A WORKPIECE DURING PROCESSING

AN APPARATUS FOR SUPPORTING A WORKPIECE (212) DURING PROCESSING OF THE WORKPIECE (212) IS DISCLOSED. THE APPARATUS COMPRISES: A CHASSIS HAVING A VACUUM CHAMBER (204) THAT IS CONNECTABLE TO A VACUUM SOURCE; A SUPPORTING DEVICE ROTATABLE RELATIVE TO THE CHASSIS, THE SUPPORTING DEVICE HAVING A HOLLOW C...

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Bibliographische Detailangaben
Hauptverfasser: CHOW LAP KEI, CHENG CHI WAH, LEUNG CHI HANG
Format: Patent
Sprache:eng
Schlagworte:
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