APPARATUS AND METHOD FOR SUPPORTING A WORKPIECE DURING PROCESSING

AN APPARATUS FOR SUPPORTING A WORKPIECE (212) DURING PROCESSING OF THE WORKPIECE (212) IS DISCLOSED. THE APPARATUS COMPRISES: A CHASSIS HAVING A VACUUM CHAMBER (204) THAT IS CONNECTABLE TO A VACUUM SOURCE; A SUPPORTING DEVICE ROTATABLE RELATIVE TO THE CHASSIS, THE SUPPORTING DEVICE HAVING A HOLLOW C...

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Bibliographische Detailangaben
Hauptverfasser: CHOW LAP KEI, CHENG CHI WAH, LEUNG CHI HANG
Format: Patent
Sprache:eng
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Zusammenfassung:AN APPARATUS FOR SUPPORTING A WORKPIECE (212) DURING PROCESSING OF THE WORKPIECE (212) IS DISCLOSED. THE APPARATUS COMPRISES: A CHASSIS HAVING A VACUUM CHAMBER (204) THAT IS CONNECTABLE TO A VACUUM SOURCE; A SUPPORTING DEVICE ROTATABLE RELATIVE TO THE CHASSIS, THE SUPPORTING DEVICE HAVING A HOLLOW COMPARTMENT (208) AND A SUPPORTING SURFACE FOR HOLDING THE WORKPIECE (212); AND AT LEAST ONE SEALING DEVICE (214) ARRANGED BETWEEN THE CHASSIS AND THE SUPPORTING DEVICE, TO PROVIDE AN AIR-TIGHT SEAL BETWEEN THE CHASSIS AND THE SUPPORTING DEVICE WHILE ALLOWING FOR ROTATION OF THE SUPPORTING DEVICE WITH RESPECT TO THE CHASSIS, SO AS TO FORM A VACUUM PASSAGE EXTENDING FROM THE SUPPORTING SURFACE OF THE SUPPORTING DEVICE THROUGH THE HOLLOW COMPARTMENT (208) OF THE SUPPORTING DEVICE AND THE VACUUM CHAMBER (204) OF THE CHASSIS TO THE VACUUM SOURCE, TO THEREBY HOLD THE WORKPIECE (212) TO THE SUPPORTING SURFACE OF THE SUPPORTING DEVICE DURING PROCESSING OF THE WORKPIECE (212). [FIG. 2]