METHODS OF SPUTTERING CADMIUM SULFIDE LAYERS FOR USE IN CADMIUM TELLURIDE BASED THIN FILM PHOTOVOLTAIC DEVICES

METHODS OF SPUTTERING CADMIUM SULFIDE LAYERS FOR USE IN CADMIUM TELLURIDE BASED THIN FILM PHOTOVOLTAIC DEVICES

METHODS ARE GENERALLY PROVIDED OF SPUTTERING A CADMIUM SULFIDE LAYER (18) ON A SUBSTRATE (12). THE CADMIUM SULFIDE LAYER (18) CAN BE SPUTTERED ON A SUBSTRATE (12)FROM A TARGET (64) IN A SPUTTERING ATMOSPHERE, WHEREIN THE TARGET (64) COMPRISES ABOUT 75% TO ABOUT 100% BY WEIGHT CADMIUM, AND WHEREIN TH...

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Bibliographische Detailangaben
Hauptverfasser: FELDMAN-PEABODY, SCOTT DANIEL, GOSSMAN, ROBERT DWAYNE
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:METHODS ARE GENERALLY PROVIDED OF SPUTTERING A CADMIUM SULFIDE LAYER (18) ON A SUBSTRATE (12). THE CADMIUM SULFIDE LAYER (18) CAN BE SPUTTERED ON A SUBSTRATE (12)FROM A TARGET (64) IN A SPUTTERING ATMOSPHERE, WHEREIN THE TARGET (64) COMPRISES ABOUT 75% TO ABOUT 100% BY WEIGHT CADMIUM, AND WHEREIN THE SPUTTERING ATMOSPHERE COMPRISES A SULFUR-CONTAINING SOURCE GAS. THE CADMIUM SULFIDE LAYER (18) CAN BE USED IN METHODS OF FORMING CADMIUM TELLURIDE THIN FILM PHOTOVOLTAIC DEVICES (10).