HIGH FREQUENCY HEATING APPARATUS

A HIGH FREQUENCY HEATING APPARATUS WHICH HEATS A SUBSTRATE (100) BY APPLYING HIGH FREQUENCY WAVES. THE HIGH FREQUENCY HEATING APPARATUS INCLUDES A HIGH FREQUENCY GENERATOR (200) WHICH GENERATES HIGH FREQUENCY TO HEAT THE SUBSTRATE (100) AND A REFLECTOR (300) WHICH REFLECTS THE HIGH FREQUENCY GENERAT...

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Bibliographische Detailangaben
Hauptverfasser: YOON YOUNG KWON, KYUNGWOOK PARK, SEO-YEONG CHO, JINSU NAM, JAEYOUNG CHOI, HOIKWAN LEE, KYUNGMIN YOON
Format: Patent
Sprache:eng
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Zusammenfassung:A HIGH FREQUENCY HEATING APPARATUS WHICH HEATS A SUBSTRATE (100) BY APPLYING HIGH FREQUENCY WAVES. THE HIGH FREQUENCY HEATING APPARATUS INCLUDES A HIGH FREQUENCY GENERATOR (200) WHICH GENERATES HIGH FREQUENCY TO HEAT THE SUBSTRATE (100) AND A REFLECTOR (300) WHICH REFLECTS THE HIGH FREQUENCY GENERATED BY THE HIGH FREQUENCY GENERATOR (200) TOWARD THE SUBSTRATE (100). (FIG. 3)