HIGH FREQUENCY HEATING APPARATUS
A HIGH FREQUENCY HEATING APPARATUS WHICH HEATS A SUBSTRATE (100) BY APPLYING HIGH FREQUENCY WAVES. THE HIGH FREQUENCY HEATING APPARATUS INCLUDES A HIGH FREQUENCY GENERATOR (200) WHICH GENERATES HIGH FREQUENCY TO HEAT THE SUBSTRATE (100) AND A REFLECTOR (300) WHICH REFLECTS THE HIGH FREQUENCY GENERAT...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A HIGH FREQUENCY HEATING APPARATUS WHICH HEATS A SUBSTRATE (100) BY APPLYING HIGH FREQUENCY WAVES. THE HIGH FREQUENCY HEATING APPARATUS INCLUDES A HIGH FREQUENCY GENERATOR (200) WHICH GENERATES HIGH FREQUENCY TO HEAT THE SUBSTRATE (100) AND A REFLECTOR (300) WHICH REFLECTS THE HIGH FREQUENCY GENERATED BY THE HIGH FREQUENCY GENERATOR (200) TOWARD THE SUBSTRATE (100). (FIG. 3) |
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