SYSTEMS AND METHODS FOR HANDLING WAFERS

A SYSTEM FOR HANDLING WAFERS (230) COMPRISING: AT LEAST ONE UNLOAD STATION (110); AT LEAST ONE INTERMEDIATE STATION (115) DESIGNED TO HOLD THE WAFERS (230) AT AN ANGLE; A PROCESSING STATION (315); AND A TRANSFER DEVICE (105) CONFIGURED TO MOVE THE WAFERS (230) BETWEEN THE STATIONS. THE INTERMEDIATE...

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Bibliographische Detailangaben
Hauptverfasser:	RIVOLLIER, FREDERIC, CHUBB, RYAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A SYSTEM FOR HANDLING WAFERS (230) COMPRISING: AT LEAST ONE UNLOAD STATION (110); AT LEAST ONE INTERMEDIATE STATION (115) DESIGNED TO HOLD THE WAFERS (230) AT AN ANGLE; A PROCESSING STATION (315); AND A TRANSFER DEVICE (105) CONFIGURED TO MOVE THE WAFERS (230) BETWEEN THE STATIONS. THE INTERMEDIATE STATION (115) MAY BE CONFIGURED TO RECEIVE THE WAFERS (230) IN A BACK-TO-BACK ARRANGEMENT. AN APPARATUS FOR HANDLING WAFERS (230) COMPRISING: ON ONE SIDE, A VACUUM GRIPPER (210) CONFIGURED TO GRIP INDIVIDUAL WAFERS (230); AND, ON THE OTHER SIDE, A GRAVITY GRIPPER (215) CONFIGURED TO SUPPORT ONE OR MORE WAFERS (230) WHEN POSITIONED BENEATH THE WAFERS (230) AND LIFTED. A METHOD FOR HANDLING WAFERS (230), COMPRISING: UNLOADING WAFERS (230); TRANSFERRING THE WAFERS (230) TO AN INTERMEDIATE STATION (115); TRANSFERRING THE WAFERS (230) FROM THE INTERMEDIATE STATION (115) TO A PROCESSING STATION (315); TREATING THE WAFERS (230); UNLOADING THE WAFERS (230) FROM THE PROCESSING STATION (325); AND RELOADING THE WAFERS (230) IN A CARRIER, WHEREIN THE WAFERS (230) ARE UNLOADED, TRANSFERRED AND RELOADED BY A TRANSFER DEVICE (105). THE MOST ILLUSTRATIVE DRAWING IS FIG 1.