POLISHING COMPOSITION CONTAINING HYBRID ABRASIVE FOR NICKEL-PHOSPHOROUS COATED MEMORY DISKS

THE INVENTION PROVIDES A POLISHING COMPOSITION THAT CONTAINS (A) AN ABRASIVE COMPRISING (I) FIRST ALPHA ALUMINA PARTICLES THAT HAVE AN AVERAGE ASPECT RATIO OF 0.8:1 TO 1.2:1, (II) SECOND ALPHA ALUMINA THAT HAVE AN AVERAGE ASPECT RATIO OF GREATER THAN 1.2:1, (III) FUMED ALUMINA PARTICLES, AND (IV) WE...

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Hauptverfasser: RUJEE LORPITTHAYA, HARESH SIRIWARDANE, SELVARAJ PALANISAMY CHINNATHAMBI
Format: Patent
Sprache:eng
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Zusammenfassung:THE INVENTION PROVIDES A POLISHING COMPOSITION THAT CONTAINS (A) AN ABRASIVE COMPRISING (I) FIRST ALPHA ALUMINA PARTICLES THAT HAVE AN AVERAGE ASPECT RATIO OF 0.8:1 TO 1.2:1, (II) SECOND ALPHA ALUMINA THAT HAVE AN AVERAGE ASPECT RATIO OF GREATER THAN 1.2:1, (III) FUMED ALUMINA PARTICLES, AND (IV) WET-PROCESS SILICA PARTICLES, AND (B) WATER. THE INVENTION ALSO PROVIDES A METHOD OF POLISHING A SUBSTRATE, ESPECIALLY A NICKEL-PHOSPHOROUS SUBSTRATE, WITH THE POLISHING COMPOSITION. (FIG 1)