WAFER HANDLER COMPRISING A VISION SYSTEM

WAFER HANDLER COMPRISING A VISION SYSTEM

A WAFER HANDLER COMPRISING, A WAFER LOADING STATION (3) FOR LOADING A WAFER (1) MOUNTED ON A TACKY FILM (2); A TENSIONER (30) FOR TENSIONING THE TACKY FILM; A PICKING MODULE (66) FOR SUCCESSIVELY PICKING A PLURALITY OF DEVICES FROM SAID WAFER; A VISION SYSTEM (5, 50) WITH ONE OR SEVERAL CAMERAS (50)...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FAURO, MASSIMO, COSTE, DAMIEN, LOPEZ DE MENESES, YURI, KUNZLI, SERGE
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A WAFER HANDLER COMPRISING, A WAFER LOADING STATION (3) FOR LOADING A WAFER (1) MOUNTED ON A TACKY FILM (2); A TENSIONER (30) FOR TENSIONING THE TACKY FILM; A PICKING MODULE (66) FOR SUCCESSIVELY PICKING A PLURALITY OF DEVICES FROM SAID WAFER; A VISION SYSTEM (5, 50) WITH ONE OR SEVERAL CAMERAS (50) FOR CAPTURING A FIRST IMAGE OF SAID WAFER OR OF PORTIONS OF SAID WAFER, SAID IMAGE COMPRISING A PLURALITY OF DEVICES.