METHOD AND APPARATUS FOR REMOVING CONTAMINATION FROM SUBSTRATE

METHOD AND APPARATUS FOR REMOVING CONTAMINATION FROM SUBSTRATE

39 METHOD AND APPARATUS FOR REMOVING CONTAMINATION FROM SUBSTRATE ABSTRACT A CLEANING MATERIAL IS DISPOSED OVER A SUBSTRATE. THE CLEANING MATERIAL INCLUDES SOLID COMPONENTS DISPERSED WITHIN A LIQUID MEDIUM. A FORCE IS APPLIED TO THE SOLID 5 COMPONENTS WITHIN THE LIQUID MEDIUM TO BRING THE SOLID COMP...

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Bibliographische Detailangaben
Hauptverfasser: REDEKER, FRED C, FREER, ERIK, M, MIKHAIL KOROLIK, KATRINA MIKHAYLICHENKO, CLINT THOMAS, JOHN PARKS, RAVKIN, MICHAEL, DE LARIOS, JOHN M
Format: Patent
Sprache:eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Zusammenfassung:39 METHOD AND APPARATUS FOR REMOVING CONTAMINATION FROM SUBSTRATE ABSTRACT A CLEANING MATERIAL IS DISPOSED OVER A SUBSTRATE. THE CLEANING MATERIAL INCLUDES SOLID COMPONENTS DISPERSED WITHIN A LIQUID MEDIUM. A FORCE IS APPLIED TO THE SOLID 5 COMPONENTS WITHIN THE LIQUID MEDIUM TO BRING THE SOLID COMPONENTS WITHIN PROXIMITY TO CONTAMINANTS PRESENT ON THE SUBSTRATE. THE FORCE APPLIED TO THE SOLID COMPONENTS CAN BE EXERTED BY AN IMMISCIBLE COMPONENT WITHIN THE LIQUID MEDIUM. WHEN THE SOLID COMPONENTS ARE BROUGHT WITHIN SUFFICIENT PROXIMITY TO THE CONTAMINANTS, AN INTERACTION IS ESTABLISHED BETWEEN THE SOLID COMPONENTS AND THE CONTAMINANTS. THEN, THE SOLID 10 COMPONENTS ARE MOVED AWAY FROM THE SUBSTRATE SUCH THAT THE CONTAMINANTS HAVING INTERACTED WITH THE SOLID COMPONENTS ARE REMOVED FROM THE SUBSTRATE.