STRIPPER FOR DRY FILM REMOVAL

OF THE DISCLOSURE STRIPPER FOR DRY FILM REMOVAL THE PRESENT INVENTION, IN A PREFERRED EMBODIMENT, IS A PHOTORESIST STRIPPER FORMULATION, COMPRISING: HYDROXYLAMINE ; WATER; A SOLVENT SELECTED FROM THE GROUP 5 CONSISTING OF DIMETHYLSULFOXICLE; N-METHYLPYRRROLIDINE; DIMETHYLACETAMIDE; DIPROPYLENE GLYCO...

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Hauptverfasser:	MICHAEL WALTER LEGENZA, MADHUKAR BHASKARA RAO, MATTHEW I. EGBE
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY CINEMATOGRAPHY CLEANING CLEANING IN GENERAL CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTROGRAPHY HOLOGRAPHY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MATERIALS THEREFOR METALLURGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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Zusammenfassung:	OF THE DISCLOSURE STRIPPER FOR DRY FILM REMOVAL THE PRESENT INVENTION, IN A PREFERRED EMBODIMENT, IS A PHOTORESIST STRIPPER FORMULATION, COMPRISING: HYDROXYLAMINE ; WATER; A SOLVENT SELECTED FROM THE GROUP 5 CONSISTING OF DIMETHYLSULFOXICLE; N-METHYLPYRRROLIDINE; DIMETHYLACETAMIDE; DIPROPYLENE GLYCOL MONOMETHYL ETHER; MONOETHANOLAMINE AND MIXTURES THEREOF; A BASE SELECTED FROM THE GROUP CONSISTING OF CHOLINE HYDROXIDE, MONOETHANOLAMINE, TETRAMETHYLAMMONIUM HYDROXIDE; AMINOETHYLETHANOLAMINE AND MIXTURES THEREOF; A METAL CORROSION INHIBITOR SELECTED FROM THE GROUP CONSISTING OF CATECHOL, GALLIC ACID, 10 LACTIC ACID, BENZOTRIAZOLE AND MIXTURES THEREOF; AND A BATH LIFE EXTENDING AGENT SELECTED FROM THE GROUP CONSISTING OF GLYCERINE, PROPYLENE GLYCOL AND MIXTURES THEREOF. THE PRESENT INVENTION IS ALSO A METHOD FOR USING FORMULATIONS AS EXEMPLIFIED IN THE PREFERRED EMBODIMENT. 15