MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH DEPOSIT OF GETTER MATERIAL AND INTEGRATED HEATER, AND SUPPORT FOR THE PRODUCTION THEREOF

MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH DEPOSIT OF GETTER MATERIAL AND INTEGRATED HEATER, AND SUPPORT FOR THE PRODUCTION THEREOF

MICROMECHANICAL (10;20) OR MICROOPTOELECTRONIC (30) DEVICES ARE DESCRIBED WHICH COMPRISE A DEPOSIT OF GETTER MATERIAL (17;25;35) FOR THE SORPTION OF GASES BEING DETRIMENTAL TO THE OPERATION OF SAID DEVICES AND AN INTEGRATED SYSTEM (18, 18',19,19') FOR HEATING THE GETTER MATERIAL FROM THE O...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: AMIOTTI MARCO
Format: Patent
Sprache:eng
Schlagworte:
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:MICROMECHANICAL (10;20) OR MICROOPTOELECTRONIC (30) DEVICES ARE DESCRIBED WHICH COMPRISE A DEPOSIT OF GETTER MATERIAL (17;25;35) FOR THE SORPTION OF GASES BEING DETRIMENTAL TO THE OPERATION OF SAID DEVICES AND AN INTEGRATED SYSTEM (18, 18',19,19') FOR HEATING THE GETTER MATERIAL FROM THE OUTSIDE AT EACH MOMENT THIS IS REQUIRED DURING THE LIFE OF THE DEVICE. VARIOUS EMBODIMENTS OF A SUPPORT FOR MANUFACTURING THESE DEVICES ARE ALSO DESCRIBED.