CORROSION-RESISTANT CMP CONDITIONING TOOLS AND METHODS FOR MAKING AND USING SAME

AN ABRASIVE TOOL (300) FOR CONDITIONING CMP PADS INCLUDES ABRASIVE GRAINS COUPLED TO A SUBSTRATE THROUGH A METAL BOND AND A COATING, E.G., A FLUORINE-DOPED NANOCOMPOSITE COATING. THE ABRASIVE GRAINS CAN BE ARRANGED IN A SELF-AVOIDING RANDOM DISTRIBUTION. IN ONE IMPLEMENTATION, AN ABRASIVE TOOL INCLU...

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Hauptverfasser:	VEDANTHAM,RAMANUJAM, DINH-NGOC,CHARLES, HWANG,TAEWOOK, PUTHANANGADY,THOMAS, RAMANATH,SRINIVASAN, WU,JIANHUI, SCHULZ,ERIC M
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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Zusammenfassung:	AN ABRASIVE TOOL (300) FOR CONDITIONING CMP PADS INCLUDES ABRASIVE GRAINS COUPLED TO A SUBSTRATE THROUGH A METAL BOND AND A COATING, E.G., A FLUORINE-DOPED NANOCOMPOSITE COATING. THE ABRASIVE GRAINS CAN BE ARRANGED IN A SELF-AVOIDING RANDOM DISTRIBUTION. IN ONE IMPLEMENTATION, AN ABRASIVE TOOL INCLUDES A COATED PLATE AND A COATED ABRASIVE ARTICLE (200) THAT HAS TWO ABRADING SURFACES. OTHER IMPLEMENTATIONS RELATED TO A PROCESS FOR PRODUCING AN ABRASIVE TOOL THAT INCLUDES A COATING AT ONE OR MORE OF ITS SURFACES. ALSO DESCRIBED ARE METHODS FOR DRESSING A CMP PAD.