RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL

A FLUID STORAGE AND DISPENSING APPARATUS INCLUDING A FLUID STORAGE AND DISPENSING VESSEL (50) HAVING A RECTANGULAR PARALLELEPIPED SHAPE, AND AN INTEGRATED GAS CABINET ASSEMBLY INCLUDING SUCH FLUID STORAGE AND DISPENSING APPARATUS AND/OR A POINT-OF-USE VENTILATION GAS SCRUBBER (61) IN THE VENTED GAS...

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Bibliographische Detailangaben
Hauptverfasser: J. DONALD CARRUTHERS, PHILIP A. MOROCO, MICHAEL J. WODJENSKI, JOSE I. ARNO, DENNIS BRESTOVANSKY
Format: Patent
Sprache:eng
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Zusammenfassung:A FLUID STORAGE AND DISPENSING APPARATUS INCLUDING A FLUID STORAGE AND DISPENSING VESSEL (50) HAVING A RECTANGULAR PARALLELEPIPED SHAPE, AND AN INTEGRATED GAS CABINET ASSEMBLY INCLUDING SUCH FLUID STORAGE AND DISPENSING APPARATUS AND/OR A POINT-OF-USE VENTILATION GAS SCRUBBER (61) IN THE VENTED GAS CABINET (20). BY THE USE OF PHYSICAL ADSORBENT AND CHEMICAL SORBENT MEDIA, THE GAS CABINET CAN BE ENCHANCED IN SAFETY OF OPERATION, E.G., WHERE THE PROCESS GAS SUPPLIED FROM THE GAS CABINET IS OF A TOXIC OR OTHERWISE HAZARDOUS CHARACTER.