PLASMA SOURCE WITH PLURALITY OF OUT OF PHASE ELECTRODES
A PLASMA SOURCE IS DESCRIBED. THE SOURCE INCLUDES A REACTIVE IMPEDANCE ELEMENT FORMED FROM A PLURALITY OF ELECTRODES (105A, 105B, 105C, 105D) BY PROVIDING SUCH A PLURALITY OF ELECTRODES AND POWERING ADJACENT OR NEIGHBOURING ELECTRODES OUT OF PHASE WITH ONE ANOTHER, IT IS POSSIBLE TO IMPROVE THE CHAR...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A PLASMA SOURCE IS DESCRIBED. THE SOURCE INCLUDES A REACTIVE IMPEDANCE ELEMENT FORMED FROM A PLURALITY OF ELECTRODES (105A, 105B, 105C, 105D) BY PROVIDING SUCH A PLURALITY OF ELECTRODES AND POWERING ADJACENT OR NEIGHBOURING ELECTRODES OUT OF PHASE WITH ONE ANOTHER, IT IS POSSIBLE TO IMPROVE THE CHARACTERISTICS OF THE PLASMA GONERATED. |
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