IMPROVED CAPACITIVE SENSOR AND METHOD FOR MAKING THE SAME

THE PRESENT INVENTION RELATES TO CAPACITIVE SENSORS FOR MEASURING HUMIDITY AND MOISTURE AND TO AN IMPROVED PROCESS FOR MAKING THE SAME. THE FABRICATION PROCESS FOR A CAPACITIVE SENSOR HAVING A MULTI-LAYER ELECTRODES FOR MEASURING HUMIDITY AND MOISTURE COMPRISING DISPOSING THE MULTI-LAYER INTERDIGITA...

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Hauptverfasser:	AZLINA MOHD ZAIN, DZUZLINDAH MUHAMAD ALIAS, SURAYA SULAIMAN, AZRIF MANUT, AGUS SANTOSO TAMSIR
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Zusammenfassung:	THE PRESENT INVENTION RELATES TO CAPACITIVE SENSORS FOR MEASURING HUMIDITY AND MOISTURE AND TO AN IMPROVED PROCESS FOR MAKING THE SAME. THE FABRICATION PROCESS FOR A CAPACITIVE SENSOR HAVING A MULTI-LAYER ELECTRODES FOR MEASURING HUMIDITY AND MOISTURE COMPRISING DISPOSING THE MULTI-LAYER INTERDIGITATED ELECTRODES (2, 9) IN A MULTI-LAYER POLYIMIDES (5, 6, 7); PROVIDING A PLURALITY OF TRENCHES (12) ON THE SURFACE OF THE ELECTRODE BY LIFT OFF PROCESS; AND COVERING THE SENSOR WITH PHOTOSENSITIVE NEGATIVE POLYIMIDE.