VISION SYSTEM FOR POSITIONING A BONDING TOOL

AN APPARATUS FOR CORRECTING A POSITIONAL OFFSET OF A BONDING TOOL (10) DURING BONDING OPERATIONS COMPRISES A FIRST FIDUCIAL MARK AND A SECOND FIDUCIAL MARK (12, 13) SPACED FROM THE FIRST FIDUCIAL MARK (12) LOCATED ON THE BONDING TOOL (10). A FIRST IMAGING PATH (18) EMANATES FROM THE FIRST FIDUCIAL M...

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Bibliographische Detailangaben
Hauptverfasser:	FUNG KA FAI, FUNG SHUN MING, KENNETH, LEUNG WING HONG, CHUNG KWOK KEE, MOK CHI LEUNG, VINCENT
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PERFORMING OPERATIONS PHYSICS REGULATING SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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