VISION SYSTEM FOR POSITIONING A BONDING TOOL

VISION SYSTEM FOR POSITIONING A BONDING TOOL

AN APPARATUS FOR CORRECTING A POSITIONAL OFFSET OF A BONDING TOOL (10) DURING BONDING OPERATIONS COMPRISES A FIRST FIDUCIAL MARK AND A SECOND FIDUCIAL MARK (12, 13) SPACED FROM THE FIRST FIDUCIAL MARK (12) LOCATED ON THE BONDING TOOL (10). A FIRST IMAGING PATH (18) EMANATES FROM THE FIRST FIDUCIAL M...

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Bibliographische Detailangaben
Hauptverfasser: FUNG KA FAI, FUNG SHUN MING, KENNETH, LEUNG WING HONG, CHUNG KWOK KEE, MOK CHI LEUNG, VINCENT
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CLADDING OR PLATING BY SOLDERING OR WELDING
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PERFORMING OPERATIONS
PHYSICS
REGULATING
SEMICONDUCTOR DEVICES
SOLDERING OR UNSOLDERING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
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Zusammenfassung:AN APPARATUS FOR CORRECTING A POSITIONAL OFFSET OF A BONDING TOOL (10) DURING BONDING OPERATIONS COMPRISES A FIRST FIDUCIAL MARK AND A SECOND FIDUCIAL MARK (12, 13) SPACED FROM THE FIRST FIDUCIAL MARK (12) LOCATED ON THE BONDING TOOL (10). A FIRST IMAGING PATH (18) EMANATES FROM THE FIRST FIDUCIAL MARK (12) AND A SECOND IMAGING PATH (20) EMANATES FROM THE SECOND FIDUCIAL MARK (13) WHEN THE FIRST AND SECOND FIDUCIAL MARKS (12, 13) ARE ILLUMINATED AT A REFERENCE POSITION. AN OPTICAL SYSTEM IS POSITIONED ALONG THE FIRST AND SECOND IMAGING PATHS (18, 20) TO VIEW IMAGES OF THE FIRST AND SECOND FIDUCIAL MARKS (12, 13). A PROCESSOR IS OPERATIVE TO CALCULATE A CURRENT POSITION OF THE BONDING TOOL (10) AND TO COMPARE IT TO A DESIRED POSITION SO THAT THE BONDING TOOL'S (10) POSITIONAL OFFSET MAY BE CORRECTED BY MOVING IT TO THE DESIRED POSITION.