DEVICE AND METHOD FOR THE SEPARATION AND THE TRANSPORT OF SUBSTRATES

DEVICE AND METHOD FOR THE SEPARATION AND THE TRANSPORT OF SUBSTRATES

THE INVENTION RELATES IN PARTICULAR TO THE SEPARATION AND TRANSPORTATION OF A DISC SHAPED SUBSTRATE (102; 202) SUCH AS E.G. A SOLAR WAFER. THE INVENTION IS CHARACTERIZED BY THE FACT THAT SEPARATIONS TAKE PLACE WITHIN A FLUID, AND THAT ADHESION FORCES RESULTING FROM A THIN FLUID FILM DEVELOP BETWEEN...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HERTER, RICHARD, KALTENBACH, KONRAD
Format: Patent
Sprache:eng
Schlagworte:
PERFORMING OPERATIONS
TRANSPORTING
WORKING CEMENT, CLAY, OR STONE
WORKING STONE OR STONE-LIKE MATERIALS
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Beschreibung
Zusammenfassung:THE INVENTION RELATES IN PARTICULAR TO THE SEPARATION AND TRANSPORTATION OF A DISC SHAPED SUBSTRATE (102; 202) SUCH AS E.G. A SOLAR WAFER. THE INVENTION IS CHARACTERIZED BY THE FACT THAT SEPARATIONS TAKE PLACE WITHIN A FLUID, AND THAT ADHESION FORCES RESULTING FROM A THIN FLUID FILM DEVELOP BETWEEN A GRIPPER (108; 208) AND THE SUBSTRATE TO BE SEPARATED (102; 202) THAT ENABLE ADHERANCE TO THE GRIPPER (108; 208). THROUGH UNLOADING PERPENDICULAR TO THE FEED DIRECTION (105; 205) OR PARTICULARLY IN PARALLEL TO THE PLANAR DESIGN OF THE SUBSTRATES (102; 202), A VERY GENTLE AND EFFICIENT SEPARATION OF DISC SHAPED SUBSTRATES (102; 202) IS POSSIBLE WITH A SHORT CYCLE TIME. (FIG. 1A)