APPARATUS AND METHOD FOR COATING A SUBSTRATE

THE INVENTION RELATES TO AN APPARATUS FOR COATING A SUBSTRATE USING PHYSICAL VAPOUR DEPOSITION, COMPRISING A VACUUM CHAMBER WHEREIN A COIL (1) IS PLACED FOR KEEPING AN AMOUNT OF CONDUCTIVE MATERIAL (10) IN LEVITATION AND FOR HEATING AND EVAPORATING THAT MATERIAL, USING A VARYING ELECTRIC CURRENT IN...

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Bibliographische Detailangaben
Hauptverfasser:	GLEIJM, GERARDUS, BAPTISTE, LAURENT CHRISTOPHE BERNARD, SCHADE VAN WESTRUM, JOHANNES ALPHONSUS FRANCISCUSMARIA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Zusammenfassung:	THE INVENTION RELATES TO AN APPARATUS FOR COATING A SUBSTRATE USING PHYSICAL VAPOUR DEPOSITION, COMPRISING A VACUUM CHAMBER WHEREIN A COIL (1) IS PLACED FOR KEEPING AN AMOUNT OF CONDUCTIVE MATERIAL (10) IN LEVITATION AND FOR HEATING AND EVAPORATING THAT MATERIAL, USING A VARYING ELECTRIC CURRENT IN THE COIL, AND WHEREIN MEANS (3) ARE PLACED IN THE COIL TO ISOLATE THE COIL FROM THE LEVITATED MATERIAL. ACCORDING TO THE INVENTION, THE APPARATUS IS CHARACTERISED IN THAT THE ISOLATING MEANS ARE PART OF A CONTAINER (2) MADE OF NON-CONDUCTIVE MATERIAL, THE CONTAINER HAVING ONE OR MORE OPENINGS (5) FOR GUIDING EVAPORATED CONDUCTIVE MATERIAL TO THE SUBSTRATE TO BE COATED. THE INVENTION RELATES TO A METHOD FOR COATING A SUBSTRATE USING PHYSICAL VAPOUR DEPOSITION.