LAMINATE BODY, METHOD, AND APPARATUS FOR MANUFACTURING ULTRATHIN SUBSTRATE USING THE LAMINATE BODY

PROVIDED IS A LAMINATED BODY (1) COMPRISING A SUBSTRATE (2) TO BE GROUND AND A SUPPORT (5), WHERE THE SUBSTRATE (2) IS GROUND TO A VERY SMALL THICKNESS AND CAN THEN BE SEPARATED FROM THE SUPPORT (5) WITHOUT DAMAGING THE SUBSTRATE (2). ONE EMBODIMENT OF THE PRESENT INVENTION IS A LAMINATED BODY (1) C...

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Bibliographische Detailangaben
Hauptverfasser:	MASARU IWASAWA, KAZUKI NODA
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS PERFORMING OPERATIONS POLISHES SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROVIDED IS A LAMINATED BODY (1) COMPRISING A SUBSTRATE (2) TO BE GROUND AND A SUPPORT (5), WHERE THE SUBSTRATE (2) IS GROUND TO A VERY SMALL THICKNESS AND CAN THEN BE SEPARATED FROM THE SUPPORT (5) WITHOUT DAMAGING THE SUBSTRATE (2). ONE EMBODIMENT OF THE PRESENT INVENTION IS A LAMINATED BODY (1) COMPRISING A SUBSTRATE (2) TO BE GROUND, A JOINING LAYER (3) IN CONTACT WITH THE SUBSTRATE (2) TO BE GROUND, A PHOTOTHERMAL CONVERSION LAYER (4) COMPRISING A LIGHT ABSORBING AGENT AND A HEAT DECOMPOSABLE RESIN, AND A LIGHT TRANSMITTING SUPPORT (5). AFTER GRINDING THE SUBSTRATE SURFACE WHICH IS OPPOSITE THAT IN CONTACT WITH THE JOINING LAYER (3), THE LAMINATED BODY (1) IS IRRADIATED THROUGH THE LIGHT TRANSMITTING SUPPORT (5) AND THE PHOTOTHERMAL CONVERSION LAYER (4) DECOMPOSES TO SEPARATE THE SUBSTRATE (2) AND THE LIGHT TRANSMITTING SUPPORT (5).