APPARATUS AND METHOD FOR UTILIZING A MENISCUS IN SUBSTRATE PROCESSING

AN APPARATUS FOR PROCESSING A SUBSTRATE IS PROVIDED WHICH INCLUDES A PROXIMITY HEAD (106-3, 106-4, 106-5, 106-6, 106-7, 106-8, 106-9, 106-10) PROXIMATE TO A SURFACE OF THE SUBSTRATE WHEN IN OPERATION. THE APPARATUS ALSO INCLUDES AN OPENING (624) ON A SURFACE OF THE PROXIMITY HEAD TO A CAVITY (642) D...

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Bibliographische Detailangaben

1. Verfasser:	ROBERT J. O'DONNELL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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