APPARATUS AND METHOD FOR UTILIZING A MENISCUS IN SUBSTRATE PROCESSING

AN APPARATUS FOR PROCESSING A SUBSTRATE IS PROVIDED WHICH INCLUDES A PROXIMITY HEAD (106-3, 106-4, 106-5, 106-6, 106-7, 106-8, 106-9, 106-10) PROXIMATE TO A SURFACE OF THE SUBSTRATE WHEN IN OPERATION. THE APPARATUS ALSO INCLUDES AN OPENING (624) ON A SURFACE OF THE PROXIMITY HEAD TO A CAVITY (642) D...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	ROBERT J. O'DONNELL
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	AN APPARATUS FOR PROCESSING A SUBSTRATE IS PROVIDED WHICH INCLUDES A PROXIMITY HEAD (106-3, 106-4, 106-5, 106-6, 106-7, 106-8, 106-9, 106-10) PROXIMATE TO A SURFACE OF THE SUBSTRATE WHEN IN OPERATION. THE APPARATUS ALSO INCLUDES AN OPENING (624) ON A SURFACE OF THE PROXIMITY HEAD TO A CAVITY (642) DEFINED IN THE PROXIMITY HEAD WHERE THE CAVITY DELIVERS AN ACTIVE AGENT TO THE SURFACE OF THE SUBSTRATE THROUGH THE OPENING. THE APPARATUS FURTHER INCLUDES A PLURALITY OF CONDUITS (302, 304, 306) ON THE SURFACE OF THE PROXIMITY HEAD THAT GENERATES A FLUID MENISCUS (116) ON THE SURFACE OF THE SUBSTRATE SURROUNDING TH.E OPENING.