APPARATUS AND METHOD FOR UTILIZING A MENISCUS IN SUBSTRATE PROCESSING

APPARATUS AND METHOD FOR UTILIZING A MENISCUS IN SUBSTRATE PROCESSING

AN APPARATUS FOR PROCESSING A SUBSTRATE IS PROVIDED WHICH INCLUDES A PROXIMITY HEAD (106-3, 106-4, 106-5, 106-6, 106-7, 106-8, 106-9, 106-10) PROXIMATE TO A SURFACE OF THE SUBSTRATE WHEN IN OPERATION. THE APPARATUS ALSO INCLUDES AN OPENING (624) ON A SURFACE OF THE PROXIMITY HEAD TO A CAVITY (642) D...

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1. Verfasser: ROBERT J. O'DONNELL
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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creator ROBERT J. O'DONNELL
description AN APPARATUS FOR PROCESSING A SUBSTRATE IS PROVIDED WHICH INCLUDES A PROXIMITY HEAD (106-3, 106-4, 106-5, 106-6, 106-7, 106-8, 106-9, 106-10) PROXIMATE TO A SURFACE OF THE SUBSTRATE WHEN IN OPERATION. THE APPARATUS ALSO INCLUDES AN OPENING (624) ON A SURFACE OF THE PROXIMITY HEAD TO A CAVITY (642) DEFINED IN THE PROXIMITY HEAD WHERE THE CAVITY DELIVERS AN ACTIVE AGENT TO THE SURFACE OF THE SUBSTRATE THROUGH THE OPENING. THE APPARATUS FURTHER INCLUDES A PLURALITY OF CONDUITS (302, 304, 306) ON THE SURFACE OF THE PROXIMITY HEAD THAT GENERATES A FLUID MENISCUS (116) ON THE SURFACE OF THE SUBSTRATE SURROUNDING TH.E OPENING.
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subjects BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
title APPARATUS AND METHOD FOR UTILIZING A MENISCUS IN SUBSTRATE PROCESSING
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