CAPILLARY IMPRINTING TECHNIQUE

@THE PRESENT INVENTION PROVIDES A METHOD FOR PATTERNING A SUBSTRATE WITH A TEMPLATE HAVING A MOLD THAT FEATURES POSITIONING CONFORMABLE MATERIAL BETWEEN THE SUBSTRATE AND THE MOLD AND FILLING A VOLUME DEFINED BETWEEN THE MOLD THE SUBSTRATE WITH THE CONFORMABLE MATERIAL THROUGH CAPILLARY ACTION BETWE...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: BYUNG-JIN CHOI, SIDLGATA V. SREENIVASAN, MICHAEL P.C. WATTS
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:@THE PRESENT INVENTION PROVIDES A METHOD FOR PATTERNING A SUBSTRATE WITH A TEMPLATE HAVING A MOLD THAT FEATURES POSITIONING CONFORMABLE MATERIAL BETWEEN THE SUBSTRATE AND THE MOLD AND FILLING A VOLUME DEFINED BETWEEN THE MOLD THE SUBSTRATE WITH THE CONFORMABLE MATERIAL THROUGH CAPILLARY ACTION BETWEEN THE CONFORMABLE MATERIAL AND ONE OF THE MOLD AND THE SUBSTRARE. THEREAFTER, THE CONFORMABLE MATERIAL IS SOLIDIFIED. SPECIFICALLY, THE DISTANCE BETWEEN THE MOLD AND THE SUBSTRATE IS CONTROLLED TO A SUFFICIENT DEGREE TO ATTENUATE, IF NOT AVOID, COMPRESSIVE FORCES BETWEEN THE MOLD AND THE SUBSTRATE. AS A RESULT, UPON INITIAL CONTACT OF THE MOLD WITH THE CONFORMABLE MATERIAL, SPONTANEOUS CAPILLARY FILLING OF THE VOLUME BETWEEN THE MOLD AND THE SUBSTRATE OCCURS.