CASSETTE FOR STORING A PLURALITY OF SEMICONDUCTOR WAFERS
A CASSETTE (2) FOR STORING A PLURALITY OF SEMICONDUCTOR WAFERS, WITH A SPACE IN A VERTICAL DIRECTION, COMPRISING A PLURALITY OF SUPPORT PLATES (18) WHICH ARE PROVIDED SPACED APART FROM ONE ANOTHER IN THE VERTICAL DIRECTION. A CUT-OUT (26) HAVING A SHAPE CORRESPONDING TO THE SHAPE OF AN ADSORBER (42)...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A CASSETTE (2) FOR STORING A PLURALITY OF SEMICONDUCTOR WAFERS, WITH A SPACE IN A VERTICAL DIRECTION, COMPRISING A PLURALITY OF SUPPORT PLATES (18) WHICH ARE PROVIDED SPACED APART FROM ONE ANOTHER IN THE VERTICAL DIRECTION. A CUT-OUT (26) HAVING A SHAPE CORRESPONDING TO THE SHAPE OF AN ADSORBER (42) FOR SUCTION HOLDING A SEMICONDUCTOR WAFER IS FORMED IN THE FRONT HALF PORTION OF EACH OF THE SUPPORT PLATES (18). THE CASSETTE (2) FURTHER COMPRISES SEPARATION PLATES (20) BETWEEN ADJACENT SUPPORT PLATES (18). |
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