DECOUPLING OF ACTUATORS FOR POSITIONING AN OBJECT

THE INVENTION PROVIDES AN APPARATUS AND A METHOD FOR POSITIONING AN OBJECT COUPLED TO A FIRST SUPPORT STRUCTURE(51) AND A SECOND SUPPORT STRUCTURE(52). A FIRST ACTUATOR DRIVES THE FIRST SUPPORT STRUCTURE ALONG A FIRST AXIS AND A SECOND ACTUATOR DRIVES THE FIRST SUPPORT STRUCTURE ALONG A SECOND AXIS...

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Bibliographische Detailangaben
Hauptverfasser: NG MAN CHUNG, RAYMOND, WIDDOWSON GARY PETER, TANG YEN HSI, TERRY
Format: Patent
Sprache:eng
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Zusammenfassung:THE INVENTION PROVIDES AN APPARATUS AND A METHOD FOR POSITIONING AN OBJECT COUPLED TO A FIRST SUPPORT STRUCTURE(51) AND A SECOND SUPPORT STRUCTURE(52). A FIRST ACTUATOR DRIVES THE FIRST SUPPORT STRUCTURE ALONG A FIRST AXIS AND A SECOND ACTUATOR DRIVES THE FIRST SUPPORT STRUCTURE ALONG A SECOND AXIS (Y)ORTHOGONAL TO THE FIRST AXIS(Z). A THIRD ACTUATOR (55)COMPRISING A FORCER AND A STATOR IS PROVIDED FOR DRIVING THE SECOND SUPPORT STRUCTURE THAT IS GUIDED FOR MOVEMENT RELATIVE TO THE FIRST SUPPORT STRUCTURE(51) ALONG A THIRD AXIS (Z)ORTHOGONAL TO THE FIRST AND SECOND AXES(X,Y). THE FORCER IS COUPLED TO THE SECOND SUPPORT STRUCTURE (52)AND IS MOVABLE WITH RESPECT TO THE STATOR, AND THE STATOR IS RELATIVELY STATIONARY AND DECOUPLED FROM THE SECOND SUPPORT STRUCTURE(52).FIG.2