IMPROVING THE STABILITY OF ION BEAM GENERATED ALIGNMENT LAYERS BY SURFACE MODIFICATION

A METHOD FOR PREPARING AN ALIGNMENT LAYER SURFACE PROVIDES A SURFACE ON THE ALIGNMENT LAYER (104). THE SURFACE (112) IS BOMBARDED WITH IONS (110), AND REACTIVE GAS IS INTRODUCED TO THE ION BEAM TO SATURATE DANGLING BONDS ON THE SURFACE. ANOTHER METHOD FOR PREPARING AN ALIGNMENT LAYER SURFACE PROVIDE...

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Hauptverfasser:	ALESSANDRO CESARE CALLEGARI, GARETH G. HOUGHAM, KEI-HSIUNG YANG, FUAD ELIAS DOANY, JAMES A. LACEY, JAMES H. GLOWNIA, JAMES P. DOYLE, PRAVEEN CHAUDHARI, ALAN E. ROSENBLUTH, EILEEN A. GALLIGAN, MINHUA LU, SHUIIH (ALAN) LIEN
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DIFFUSION TREATMENT OF METALLIC MATERIAL FREQUENCY-CHANGING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-LINEAR OPTICS NON-METALLIC ELEMENTS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS ORGANIC CHEMISTRY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	A METHOD FOR PREPARING AN ALIGNMENT LAYER SURFACE PROVIDES A SURFACE ON THE ALIGNMENT LAYER (104). THE SURFACE (112) IS BOMBARDED WITH IONS (110), AND REACTIVE GAS IS INTRODUCED TO THE ION BEAM TO SATURATE DANGLING BONDS ON THE SURFACE. ANOTHER METHOD FOR PREPARING AN ALIGNMENT LAYER SURFACE PROVIDES A SURFACE ON THE ALIGNMENT LAYER. THE SURFACE IS BOMBARDED WITH IONS (116) AND QUENCHED WITH A REACTIVE COMPONENT TO SATURATE DANGLING BONDS ON THE SURFACE .(FIG. 7)