METHOD AND APPARATUS FOR INSPECTING AN OBJECT

AN INSPECTION APPARATUS IS PROVIDED FOR INSPECTING SEMICONDUCTOR DEVICES ARRANGED ON A CARRIER TRAY. THE APPARATUS INCLUDES A TOP SURFACE AND MARK (TSM) INSPECTION STATION (4), FIRST PICK AN PLACE MEANS (2) FOR TRANSPORTING THE DEVICES BETWEEN THE CARRIER TRAY AND THE TSM INSPECTION STATION, A SOLDE...

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Bibliographische Detailangaben
1. Verfasser:	TAN CHIN HIANG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Zusammenfassung:	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