APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR DEVICES

THERE IS DISCLOSED AN APPARATUS FOR SUPPORTING SINGULATED ELECTRONIC DEVICES DURING A TESTING OPERATION, COMPRISING: A MAIN BODY (4) AND A SUPPORT MEMBER (1), WHEREIN SAID SUPPORT MEMBER (1) IS MADE OF NON-CONDUCTING HIGH- RESISTIVITY MATERIAL AND COMPRISES A PLURALITY OF RECESSES (2), EACH SAID REC...

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Bibliographische Detailangaben
Hauptverfasser:	TSUI CHING MAN, STANLEY, BILAN CURITO M., JR, CHOW ERIC
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	THERE IS DISCLOSED AN APPARATUS FOR SUPPORTING SINGULATED ELECTRONIC DEVICES DURING A TESTING OPERATION, COMPRISING: A MAIN BODY (4) AND A SUPPORT MEMBER (1), WHEREIN SAID SUPPORT MEMBER (1) IS MADE OF NON-CONDUCTING HIGH- RESISTIVITY MATERIAL AND COMPRISES A PLURALITY OF RECESSES (2), EACH SAID RECESS (2) BEING ADAPTED TO RECEIVE AN INDIVIDUAL SINGULATED DEVICE. THERE IS ALSO DISCLOSED A METHOD FOR TESTING SUCH DEVICES IN WHICH THE DEVICES ARE CARRIED ON SUPPORT MEMBERS (29) THROUGH A TESTING PROCESS INCLUDING ONE OR MORE ENVIRONMENTAL CONTROL CHAMBERS. FIG. 5.