APPARATUS, AND CORRESPONDING METHOD, FOR CHEMICALLY ETCHING SUBSTRATES

AN APPARATUS (10) FOR CHEMICALLY ETCHING THE COPPER FOIL OF A COPPER FOIL-CLAD SUBSTRATE (116) ARE DISCLOSED. SIGNIFICANTLY, THIS APPARATUS INCLUDES FLUID JET INJECTORS (70-1, 70-2, 80-2) WHICH SERVE TO PRODUCE JETS OF CHEMICAL ETCHANT. THESE FLUID JET INJECTORS ARE ARRANGED SO AS TO SIMULTANEOUSLY...

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Hauptverfasser:	LYN BRAXTON RATCLIFF, EDWARD JAY FRANKOSKI, JEFFREY DONALD JONES, ROBERT HENRY KATYL
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING CLEANING IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL PRINTED CIRCUITS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Zusammenfassung:	AN APPARATUS (10) FOR CHEMICALLY ETCHING THE COPPER FOIL OF A COPPER FOIL-CLAD SUBSTRATE (116) ARE DISCLOSED. SIGNIFICANTLY, THIS APPARATUS INCLUDES FLUID JET INJECTORS (70-1, 70-2, 80-2) WHICH SERVE TO PRODUCE JETS OF CHEMICAL ETCHANT. THESE FLUID JET INJECTORS ARE ARRANGED SO AS TO SIMULTANEOUSLY ACHIEVE A RELATIVELY HIGH ETCH RATE AND A RELATIVELY HIGH ETCH UNIFORMITY. (FIG. 1)