POLISHING PAD CONDITIONING
A ROTATING POLISHING WHEEL (15) HAVING SECURED TO ITS TOP SURFACE A POLISHING PAD (13) AND A VERTICALLY MOVABLE CARRIER ELEMENT ( 18) FOR CARRYING A WORKPIECE ( II) TO BE POLISHED INTO CONTACT WITH THE POLISHING PAD AND EXERTING A DESIRED PRESSURE ON THE WORKPIECE. OPERATIVELY ATTACHED TO THE CARRIE...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A ROTATING POLISHING WHEEL (15) HAVING SECURED TO ITS TOP SURFACE A POLISHING PAD (13) AND A VERTICALLY MOVABLE CARRIER ELEMENT ( 18) FOR CARRYING A WORKPIECE ( II) TO BE POLISHED INTO CONTACT WITH THE POLISHING PAD AND EXERTING A DESIRED PRESSURE ON THE WORKPIECE. OPERATIVELY ATTACHED TO THE CARRIER IS A CONDITIONING ELEMENT (24) MOVABLE WITH THE CARRIER AND HAVING ON ITS BOTTOM SURFACE CUTTING MEANS (30) DISPOSED IN A CIRCULAR CONFIGURATION FOR CONDITIONING THE POLISHING PAD BY CONTACT THEREWITH. FIG.1 |
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